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TECHFIND - ENERGY
MEMS Vibration Power Harvesting
The Micropower Generation and Storage program at a research center in the Netherlands has developed a MEMS based piezoelectric harvesting device that can generate 85 micro watts of electrical power using vibrations. The robust device was developed using a wafer level packaging method and fabricated using CMOS compatible techniques. It consists of a silicon mass suspended on a beam of Aluminum Nitride (the piezoelectric material). The device has been connected to a temperature sensor, which is supplied enough energy to operate and wireless transmit data in a method that is fully autonomous. The harvestor was efficient enough to generate enough power to measure temperature and transmit the result to the base station within fifteen seconds. The device harvests vibrations within the frequency domain of 150 to 1200 Hz as the dimensions and mass of the beam changes. The use of aluminum nitride compared to lead zirconate titanate allows for a record power output and it can be deposited faster without control issues.
Media Spiders®
The Micropower Generation and Storage program at a research center in the Netherlands has developed a MEMS based piezoelectric harvesting device that can generate 85 micro watts of electrical power using vibrations. The robust device was developed using a wafer level packaging method and fabricated using CMOS compatible techniques. It consists of a silicon mass suspended on a beam of Aluminum Nitride (the piezoelectric material). The device has been connected to a temperature sensor, which is supplied enough energy to operate and wireless transmit data in a method that is fully autonomous. The harvestor was efficient enough to generate enough power to measure temperature and transmit the result to the base station within fifteen seconds. The device harvests vibrations within the frequency domain of 150 to 1200 Hz as the dimensions and mass of the beam changes. The use of aluminum nitride compared to lead zirconate titanate allows for a record power output and it can be deposited faster without control issues. 
